<p>Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).</p>
申请公布号
WO2007067342(A2)
申请公布日期
2007.06.14
申请号
WO2006US44980
申请日期
2006.11.20
申请人
ENTEGRIS, INC.;GONNELLA, GEORGE;CEDRONE, JAMES;GASHGAEE, IRAJ;MAGOON, PAUL
发明人
GONNELLA, GEORGE;CEDRONE, JAMES;GASHGAEE, IRAJ;MAGOON, PAUL