| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drive control method of a piezoelectric actuator capable of performing drive control appropriately and stably, in response to a change in drive conditions suitable for a prescribed drive state. <P>SOLUTION: The drive control unit of the piezoelectric actuator has a controller, and performs an initial setting process having an optimum phase difference acquisition process P1 and a phase difference inversion detection process P4 at a prescribed frequency, thus prescribing an optimum phase difference again each time, when the optimum phase difference acquisition process P1 is performed, even if a temperature change and abrasion occur due to continuous drive. Even if the phase difference between a drive signal and a detection signal is inverted due to variations or the like, in the oscillation characteristics of the piezoelectric actuator, when a drive frequency is swept, a phase difference inversion frequency and a clamp frequency are set again for controlling so that phase difference feedback will not become abnormal control, each time the phase difference inversion detection process P4 is performed. Since appropriateness and stability in the optimum phase difference can be secured, appropriate drive control can be executed, based on the optimum phase difference. <P>COPYRIGHT: (C)2007,JPO&INPIT |
