| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring a surface profile that reduces the effect of noise within an interference spectrum. SOLUTION: In the surface profile measuring method, the interference is generated between reflected lights of two surfaces, by irradiating the surface of an object to be measured and the reference surface, after the light of a wideband light source is divided via a spectroscope. The interference spectrum whose height value corresponds to the light intensity is generated, by changing the distance between the surface of the object and the spectroscope by a constant step. This interference spectrum is then scanned, to find a first interference fringe corresponding to the maximum light intensity. Thereafter, a second interference fringe having the optimum symmetry is found, by using the principle of symmetry of interference spectrum in the first interference fringe and the interference fringes in the vicinity thereof. In the second interference fringe, a phase compensation method is used to calculate the null optical path difference part, corresponding to the wavefront of the second interference fringe, i.e. the height value of the surface of the object to be measured. COPYRIGHT: (C)2007,JPO&INPIT
|
