| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room structure capable of preventing dropping of a grating to an underfloor space in regard to a clean room structure provided with a grating arranged on a floor of a clean room, and an underfloor space arranged below the floor of the clean room. SOLUTION: An outline of the grating 26 is formed like a cylinder. A grating housing groove 27 having a cylindrical recessed part 48 housing the grating 26, and a cylindrical opening 49 with a diameter smaller than the grating 26 below the recessed part 48, is provided in the floor 34 of the clean room 24. COPYRIGHT: (C)2007,JPO&INPIT
|
