| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate accommodating container which does not need any wide working space and capable of performing a taking-out/putting-in work of a large substrate without staining and damaging a surface thereof. <P>SOLUTION: The mask blank accommodating body 1 is accommodated and held while a mask blank 50 is sealed to a substrate accommodating container 10. In the substrate accommodating container 10, an inner container 30 is accommodated in an outer container 20 in a drawable manner and the mask blank 50 of a large size is accommodated in the inner container 30 with an outer peripheral end face being held. When the inner container 30 is drawn out of the outer container 20, and an inner container lid 32 of the inner container 30 is detached, a back surface 51f of the mask blank 50 is exposed. The mask blank 50 can be taken out of an inner container body 31 by using a tool such as a suction cup, and moved to a predetermined place. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
