MOTOR CONTROLLER AND CONVEYANCE SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a conveyance system for obtaining necessary position precision without making it necessary to store dimensional accuracy or to apply any dimensional margin and a motor driving controller for enabling it. SOLUTION: This motor controller is provided with a mapping device 5 for moving a mapping sensor 4 to the loading direction of a wafer 7 and a motor control part 15 for controlling a motor 2. The power control part 15 calculates a deviation value between the reference position of a rack 8 held therein and the reference position of the rack 8 actually measured by the mapping sensor 4. Then, the correction of teaching data is applied according as the wafer 7 is carried out and carried in by a conveyance robot. COPYRIGHT: (C)2007,JPO&INPIT