ABRASIVE PARTICULATE MATERIAL, AND METHOD OF PLANARIZING A WORKPIECE USING THE ABRASIVE PARTICULATE MATERIAL
摘要
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0wt% of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20g/cm<SUP>3</SUP>
申请公布号
WO2007047547(A3)
申请公布日期
2007.06.14
申请号
WO2006US40295
申请日期
2006.10.13
申请人
SAINT-GOBAIN CERAMICS & PLASTICS, INC.;HAERLE, ANDREW, G.;WANG, JUN
