| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a ceramic substrate with a black surface in which the reflectivity in a visible ray region on the surface is satisfactory even in the case of a thin sintered compact substrate of about 0.3 mm, and having high thermal conductivity and excellent strength as well. <P>SOLUTION: Regarding the ceramic substrate, the surface of the ceramic substrate is provided with an alumite layer with a thickness of 6 to 34 μm, and black pigment is injected into the each pore of the alumite layer. In the ceramic substrate, at least the surface is black, the reflectivity to visible ray with a wavelength of 500 nm in the surface is ≤10%, and its thermal conductivity is ≥50 W/mK. When a silicon nitride substrate is used as the ceramic substrate, the bending strength of the ceramic substrate can be controlled to ≥500 MPa. When an aluminum nitride substrate is used, the thermal conductivity of the ceramics substrate can be controlled to ≥60 W/mK, and its bending strength can be controlled to ≥500 MPa. <P>COPYRIGHT: (C)2007,JPO&INPIT |
