发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device and a manufacturing method thereof are provided to prevent the degradation of crystallinity of a semiconductor layer for forming a field effect transistor and to improve the controllability of a critical value due to a back gate electrode. A semiconductor layer is formed on a semiconductor substrate(11) by using an epitaxial growth. A first buried insulating layer(22) is buried in a first region(R1), wherein the first region is located between the semiconductor substrate and the semiconductor layer. A second buried insulating layer(24) is buried in a second region(R2), wherein the second region is located between the semiconductor substrate and the semiconductor layer. An efficient work function or a fixed charge amount of the first buried insulating layer is different from the second buried insulating layer.
申请公布号 KR20070061386(A) 申请公布日期 2007.06.13
申请号 KR20060123032 申请日期 2006.12.06
申请人 SEIKO EPSON CORPORATION 发明人 KATO JURI
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
地址
您可能感兴趣的专利