| 摘要 |
A method and apparatus for scribing a substrate is provided to interrupt particles generated at formation of scribing lines by using shields formed on both sides of a scriber. A glass substrate is fixed, and scribing lines are formed on the glass substrate using a scriber(40). Shields(60,61,62) prevent particles generated at the formation of the scribing lines from infiltrating into an electrode pattern formed on the glass substrate. The generated particles are discharged. The shields are formed on both sides of the scriber. The discharge of the particles are performed by a suction device(50) and a vacuum generating device. |
