AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE,申请号EP20020717727-传众专利搜索

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发明名称	AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	EP1381656(A4)	申请公布日期	2007.06.13
申请号	EP20020717727	申请日期	2002.03.27
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	WOJTCZAK, WILLIAM, A.;SEIJO, FATIMA, MA.;BERNHARD, DAVID;NGUYEN, LONG
分类号	C09K13/00;C11D7/10;C09K13/06;C09K13/08;C11D7/26;C11D7/32;C11D7/60;G03F7/42;H01L21/02;H01L21/027;H01L21/304;H01L21/306;H01L21/3065;H01L21/311;H01L21/321;H01L21/3213	主分类号	C09K13/00
代理机构		代理人
主权项
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