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发明名称
COMPRESSIVE SIGE <110> GROWTH AND STRUCTURE OF MOSFET DEVICES
摘要
申请公布号
EP1794786(A2)
申请公布日期
2007.06.13
申请号
EP20050785191
申请日期
2005.06.21
申请人
NTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHAN, KEVIN K.;GUARINI, KATHRYN W.;IEONG, MEIKEL;RIM, KERN;YANG, MIN
分类号
H01L29/04;H01L21/20;H01L21/205;H01L21/336;H01L21/8234;H01L21/8238;H01L29/06;H01L29/10;H01L29/76;H01L29/94;H01L31/0328;H01L31/0336;H01L31/036;H01L31/062;H01L31/113;H01L31/119
主分类号
H01L29/04
代理机构
代理人
主权项
地址
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