| 摘要 |
An exhaust line temperature control system of semiconductor manufacturing equipment is provided to enhance productivity of the equipment by replacing an abnormal heating unit alone using a plurality of heating units discretely installed at each portion of an exhaust line. An exhaust line temperature control system of semiconductor manufacturing equipment includes a plurality of heating units(H1 to Hn) for enclosing an exhaust line, a power supply unit, a plurality of thermostats, and a main control unit. The power supply unit(1) is supplied to one side of the heating units in order to be electrically connected with the heating units. The thermostats(10a to 10n) are installed between the heating units and the power supply unit corresponding to the heating units. The thermostats are used for controlling the temperature of each heating unit. The main control unit(5) is installed between the power supply unit and the thermostats.
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