COUPLING FOR FLUID CONTROL APPARATUS AND FLUID CONTROL APPARATUS USING THE COUPLING

摘要

A coupling for a fluid control apparatus and a fluid control apparatus using the same are provided to remarkably lighten in comparison with a conventional coupling by employing light material to form the coupling. A coupling for a fluid control apparatus includes a connection member(23) and a channel member(24). The connection member has a groove at the center of the connection member. A device formation member is fixed by a male screw member for adhering the device formation part. The channel member has a channel path(12) and exists at the groove. The channel member is made of corrosion resistance substances. Specific gravity of the connection member is less than that of the channel member because the connection member is made of light specific gravity substances. A component member of the groove screw connected with the male screw member for adhering the device formation part is buried in the connection member. The component member of the groove and the channel member are made of stainless steel or stainless alloy. The connection member is made of aluminum.