| 摘要 |
A circulation fan apparatus including a hermetic vessel 1 containing a corrosive process gas therein, and a circulation fan 2 installed in the hermetic vessel, rotors 2-1, 2-2 of the circulation fan are rotatably supported by bearings, wherein the bearings comprises control-type radial magnetic bearings 4, 5 and at least control-type axial magnetic bearing 6, 7, displacement sensor targets 4-1, 5-1, 6-1, and 7-1 and rotor-side magnetic poles 4-2, 5-2, 6-2, and 7-2 of radial magnetic bearings 4 and 5 and axial magnetic bearings 6 and 7 are fixed to the rotors 2-1 and 2-2 of the circulation fan 2 and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors 4-3, 5-3, 6-3, and 7-3 and stator-side magnetic poles 4-4, 5-4, 6-4, and 7-4 opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans 14, 15, 17, and 18 interposed therebetween, whereby even when the circulation fan 2 is rotated at a high speed and under a high load, the process gas is not contaminated, ensuring maintenance-free operation, and furthermore, an installation space can be reduced.
|
