发明名称 |
Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component |
摘要 |
A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.
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申请公布号 |
US7229694(B2) |
申请公布日期 |
2007.06.12 |
申请号 |
US20030446583 |
申请日期 |
2003.05.27 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
MUELLER LUTZ;KEHR KERSTEN;ULM MARKUS |
分类号 |
B32B9/04;B05D5/08;B05D7/24;B81B3/00;C09D4/00;C09D183/08;C23C28/00;C23C28/04 |
主分类号 |
B32B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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