| 摘要 |
A two-fluid jet module for cleaning a substrate and a substrate cleaning device using the same are provided to improve a cleaning efficiency of the substrate by uniformly spraying two flows of mist onto the surface of the substrate. A first accommodation portion(210) is formed in a body(200) of a two-fluid jet module and is supplied with dry air. A second accommodation portion(310) is formed in the body, and is supplied with a cleaning solution. One end of a spray passage(330) is communicated with the first accommodation, and the other end is exposed outwardly from the body. The spraying passage has flow mixing holes(331,332) eccentrically formed for producing vertex flow of the dry air and cleaning solution.
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