DIFFUSION APPARATUS AND METHOD FOR CONNECTING A TURBO VACUUM PUMP USING THE SAME

摘要

A diffusion device for fabricating a semiconductor device and a method for connecting a vacuum pump thereof are provided to prevent leakage of vacuum from a turbo vacuum pump to a first movable connection port via a second vacuum pump. A heat part is installed on one end of a bell shaped diffusion furnace used for fabricating a semiconductor device. A first connection port is installed on a flange of the heater part to connect a vacuum pump. A movable part(62) is installed on one end of the first connection port to move a second connection port of the vacuum pump. The movable part has a safety link(70) for preventing release of the second connection port, and a fixing portion(64) connected to a handle of the movable part.