| 摘要 |
A manufacturing method includes the steps of disposing a base substance for a solar cell element inside a first chamber and then supplying a first gas to etch one principal surface of the base substance, thereby roughening the one principal surface while attaching an etch residue thereto; and disposing the base substance inside a second chamber and then supplying a second gas having lower reactivity than the first gas to convert the second gas into a plasma state, thereby removing the etch residue remaining on the one principal surface.
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