| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing material, which has high hardness and enables easy grain size control, and thus is appropriate for precise polishing. <P>SOLUTION: The polishing material has a carbon fiber structure in the form of a three dimensional network composed of carbon fibers with an external diameter ranging from 15 to 100 nm. In an embodiment of the carbon fiber structure, a plurality of the carbon fibers extend from granular parts where the carbon fibers bind to each other. The granular parts are formed in a growth process of the carbon fibers. The polishing material contains such carbon fiber structure and/or a ground product thereof in the form of abrasive grains. <P>COPYRIGHT: (C)2007,JPO&INPIT |
