| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron beam drawing apparatus which can perform verification of mass map data. <P>SOLUTION: A data control section 20 operates drawing data obtained from a drawing data storage section 50 to generate data for controlling an electron beam drawing apparatus. The data control section 20 comprises a section 70 for receiving and restoring the drawing data obtained from the drawing data storage section 50, a data operating section 80 performing filter operation of restored data to generate map data, and a shot control section 90 for generating figure drawing shot data with reference to the map data. A temporary storage section 100 connected with the pipeline of the data operating section 80 stores the map data temporarily and transfers it to the drawing data storage section 50. <P>COPYRIGHT: (C)2007,JPO&INPIT |
