| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device which can reduce vibration caused by change of velocity of a stage, an electron beam irradiation device, and an exposure device. <P>SOLUTION: In the stage device, a stage (101) which moves along a guide rail (105) is driven and controlled. It changes in response to change of frictional force applied to the stage (101), has a correction table (113a) which stores a control amount driving and controlling the stage as a function of a position and velocity of the stage (101), and controls a driving torque driving the stage (101) by using the correction table (113a). <P>COPYRIGHT: (C)2007,JPO&INPIT |
