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经营范围
发明名称
Apparatus and method for examining specimen with a charged particle beam
摘要
申请公布号
EP1455379(B1)
申请公布日期
2008.01.02
申请号
EP20040009739
申请日期
1999.07.02
申请人
ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUERHALBLEITERPRUEFTECHNIK MBH
发明人
FEUERBAUM, HANS-PETER;WINKLER, DIETER
分类号
G01Q30/12;H01J37/02;G01Q30/16;H01J37/28
主分类号
G01Q30/12
代理机构
代理人
主权项
地址
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