| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the variance in substrate gap among substrates regardless of the variance in thickness of inter-layer insulating films in a common contact part and to reduce the occurrence of contact defects caused by a conductive spacer. SOLUTION: A first conductive film 103, an insulating film 104, an opening 111 formed in the insulating film 104, and a second conductive film 105 covering a remaining insulating film 104a and the opening 111 are provided on a first substrate 101. On the insulating film 104a, the second conductive film 105 on the first substrate and a third conductive film 106 on a second substrate 102 are electrically connected by a conductive spacer 107, and a substrate gap G is held by the conductive spacer 107. The substrate gap G depends on only a size of the conductive spacer 107. Consequently, when conductive spacers 107 are equal in size, the same substrate gap G can be given to respective substrates regardless of the variance in thickness t of insulating films 104 among the substrates. COPYRIGHT: (C)2007,JPO&INPIT |
