| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask storage container opening apparatus, or the like for surely disengaging the upper and the lower lids in a mask storage device. <P>SOLUTION: Pieces of mask storage container opening apparatus 18, 30 separate a mask storage container that stores a mask and moves in the atmospheric environment and vacuum environment, into a base member 2b for placing the mask and a lid member 2a for covering the mask in the vacuum environment. The pieces of mask storage container opening apparatus 18, 30 comprise a mask conveyance for placing and conveying the mask storage container; a lid material engaging part 18b for engaging and placing the lid member; and a base member pressor 33a for pressing a base member 2b toward a mask-carrying device, thus making the lid member latch by the lid member material engaging part 18b, lowering the base member 2b from the mask conveyance, and making the base member 2b separated from the lid member 2a. <P>COPYRIGHT: (C)2007,JPO&INPIT |
