| 摘要 |
PROBLEM TO BE SOLVED: To provide semiconductor optical waveguides capable of preventing a decline in coupling efficiency with other semiconductor optical waveguide, and to provide a method of manufacturing the same. SOLUTION: A method for manufacturing an optical semiconductor device includes: a step of performing a selective etching on a multilayer structure including a first semiconductor optical waveguide (30) on a semiconductor substrate (10) so as to expose a joint plane which is sloped with respect to the ä011} plane and has an overhanging region including an edge of the first semiconductor optical waveguide; a step of growing an In<SB>(1-x)</SB>Ga<SB>x</SB>As<SB>(1-y)</SB>P<SB>y</SB>(0<x≤1, 0≤y<1) cap layer (50) on the joint plane; and a step of growing a second semiconductor optical waveguide (61) together with the overhanging region of the first semiconductor optical waveguide. COPYRIGHT: (C)2009,JPO&INPIT |
