| 摘要 |
PROBLEM TO BE SOLVED: To obtain a confocal scanning type microscope achieving accurate height measurement and being improved in user's operability. SOLUTION: A photodetector 5 detects the intensity of light coming from a sample 16 passing through an objective 15 and a pinhole plate 18 arranged at a position conjugate to a light condensing position of the objective 15. A control part 2 acquires a confocal image of the sample 16 based on the intensity of the light, while it designates a region of interest on the sample 16 and acquires the designated region of interest as a condition calculation object region. Furthermore, the control part 2 calculates the detection sensitivity of the photodetector 5, when the confocal image is acquired from luminance information within the acquired condition calculation object region, and calculates the relative position of the objective 15 to the sample 16, where the detection sensitivity of the photodetector 5 is switched to the calculated sensitivity. COPYRIGHT: (C)2007,JPO&INPIT
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