| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sprayed coating-coated member for various semiconductor devices which has reduced damage caused by a corrosive action such as a halogen compound-containing environment, and also does not bring out deterioration in the quality of semiconductor working devices and the increase of production cost caused by the environmental contamination owing to the corrosion product thereof. <P>SOLUTION: The member having excellent plasma erosion resistance is obtained by subjecting the surface of a sprayed coating formed on the surface of a base material and composed of Al<SB>2</SB>O<SB>3</SB>, Y<SB>2</SB>O<SB>3</SB>or Al<SB>2</SB>O<SB>3</SB>-Y<SB>2</SB>O<SB>3</SB>double oxide to electron beam irradiation treatment. Thus, the member has excellent sticking and deposition properties of particles or the like, and the rescattering thereof can be effectively prevented. The production method uses the same. <P>COPYRIGHT: (C)2007,JPO&INPIT |
