IMPRINTING DEVICE AND IMPRINTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an imprinting device which can prevent the occurrence of a defect in a material to be molded during the separation of a imprinting mold and an imprinting method. SOLUTION: The imprinting device transfers the fine structure 10a of the mold to the material to be molded by pressing/demolding by making the mold 10 fixed to the side of a device body by a mold fixing members and the material to be molded approach each other relatively. The mold fixing members 12 and 13 fix the mold to facilitate the elastic deformation of the mold in the press direction during demolding. COPYRIGHT: (C)2007,JPO&INPIT