发明名称 Pattern formed body and method for manufacturing same
摘要 A main object of the present invention is to provide a high quality pattern formed body, wherein only the target region is made liquid repellent with a high precision at the time of forming a pattern made of a lyophilic region and a liquid repellent region by use of plasma radiating; and a method for manufacturing the same. To achieve the object, the present invention provides a method for manufacturing a pattern formed body comprising a plasma radiating step of radiating plasma to a patterning substrate having: a base material; a photocatalyst containing layer formed on the base material and containing at least a photocatalyst; and a resin layer formed in a pattern form on the photocatalyst containing layer and containing at least a resin, wherein a fluorine compound is used as an introduction gas to radiate the plasma to make the upper face of the resin layer liquid repellent.
申请公布号 US2007128738(A1) 申请公布日期 2007.06.07
申请号 US20060472890 申请日期 2006.06.22
申请人 KOBAYASHI HIRONORI;MATSUKAWA AYAO 发明人 KOBAYASHI HIRONORI;MATSUKAWA AYAO
分类号 H01L21/00 主分类号 H01L21/00
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