| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist dilution system equipped with pipes where easy-to-dry liquids such as highly viscous resists flow. <P>SOLUTION: A resist dilution system 1 consists of a pipe 3 equipped with a highly viscous resist pipe 3a, a diluent solvent pipe 3b, and a discharger 3e; and a preparation tank 2 for mixing a highly viscous resist fed via the highly viscous resist pipe 3a and discharged via the discharger 3e, and a diluent solvent fed via the diluent solvent pipe 3b and discharged via the discharger 3e. Consequently, highly viscous resists on the pipe are constantly washed away by the diluent solvent during use. <P>COPYRIGHT: (C)2007,JPO&INPIT |
