| 摘要 |
PROBLEM TO BE SOLVED: To enable controlling a slope direction of a plate-like member at several volts which is the same level as an operating voltage of an LSI memory circuit, in a light deflecting device which performs light deflecting operation by switching the slope direction of the plate-like member comprising a light reflective area. SOLUTION: In addition to driving electrodes 103a to 103d for driving the plate-like member 107 of the light deflecting device 100 by electrostatic force, the light deflecting device is provided with control electrodes 103e, 103f which control the starting of the plate-like member and maintain the inclination so that the plate-like member does not change the slope direction. A semiconductor storage element 200 is prepared under the light deflecting device 100, and complimentary outputs 201, 202 of the memory device are connected to the control electrodes 103e, 103f, respectively. COPYRIGHT: (C)2007,JPO&INPIT
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