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发明名称
摘要
申请公布号	JP3927280(B2)	申请公布日期	2007.06.06
申请号	JP19970160553	申请日期	1997.06.03
申请人		发明人
分类号	G01B11/00;G01B11/24;G01B11/245;G01N21/88;G01N21/956;H01L21/321;H01L21/60;H05K3/34	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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