| 摘要 |
<p>In a scribing apparatus, an irradiation part formed by a laser beam from the apparatusis formed by the laser beam having an irradiation energy distribution composedof Gaussian distribution. When the irradiation energy distribution has a lineto be divided as a center axis, the distribution has two peak parts separated fromone another by a width (W) having the center axis at the center, and irradiationenergy between the two peak parts is zero.</p> |
