| 摘要 |
A wafer transferring unit is provided to prevent damage of a wafer by sensing ejection of a wafer and stopping an operation thereof in a wafer transferring process. A wafer(W) is loaded on a wafer loading unit(200). The wafer loading is disposed movably at a predetermined position. A wafer alignment detection unit is provided on the wafer loading unit in order to sense the protrusion or the jump of the wafer to the lateral direction of the wafer. The wafer loading unit includes bodies(210) for surrounding a main body(110) and supporters(220) formed at the bodies. The supporter is formed with a contact side contacting a bottom surface of an edge part of the wafer and a guide side for guiding a lateral part of the edge part of the wafer.
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