METHOD OF MANUFACTURING PHOTOMASK AND PHOTO-MASK MANUFACTURED THEREBY

摘要

A method of manufacturing a photo-mask, which includes the steps of applying a resist film (3) onto a substrate (1) of quartz, glass and the like, subjecting the resist film (3) to light exposure and development to form a fine resist pattern (4), etching the mask substrate (1) covered by the fine resist pattern (4) so as to cause a non-light transmitting thin film (2) of Cr, Ta, etc. to adhere thereon by vapor deposition, sputtering and the like, and removing the thin film (2) on the resist pattern (4) together with the resist film (3), thereby to form the photo-mask. The disclosure is also directed to a photo-mask manufactured by the above method.