发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 A semiconductor device and its fabricating method are provided to enlarge a contact area between a contact and an impurity region by forming contacts having different heights in the impurity region. An impurity region(20) is formed in a semiconductor substrate(10), and an insulation layer(30) is formed on the impurity region. Contacts(40,50,60) penetrate the insulation layer to form given stepped portions in the impurity region. The contact consists of a first contact and a second contact, and the stepped portion is formed by the first and second contacts. The first contact is deeply formed in the impurity region relative to the second contact.
申请公布号 KR100727254(B1) 申请公布日期 2007.06.04
申请号 KR20050130860 申请日期 2005.12.27
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KO, YOUNG SUK
分类号 H01L21/335 主分类号 H01L21/335
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