THIN FILM DEPOSITION FROM ATOMIC LAYER DEPOSITION OR CHEMICAL VAPOR DEPOSITION AND THEIR USES,申请号KR20050109881-传众专利搜索

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发明名称	THIN FILM DEPOSITION FROM ATOMIC LAYER DEPOSITION OR CHEMICAL VAPOR DEPOSITION AND THEIR USES
摘要
申请公布号	KR100724084(B1)	申请公布日期	2007.06.04
申请号	KR20050109881	申请日期	2005.11.16
申请人		发明人
分类号	C23C16/18	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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