| 摘要 |
PROBLEM TO BE SOLVED: To maintain stably contact between a probe pin and a wafer. SOLUTION: Screws 50 are provided on a plurality of spots on the peripheral part of a printed wiring board 13. Each screw 50 is screwed with a reinforcing plate 25, and penetrates the peripheral part of the printed wiring board 13. A pressing plate 60 is provided on the under face side of the peripheral part of the printed wiring board 13, and the lower end face of the screw 50 is pressed by the pressing plate 60. The pressing plate 60 is fixed to a card holder 14 through a spacer 61. A nut 51 is mounted on the upper end side of the screw 50. The peripheral part of the printed wiring board 13 is lifted by turning the screw 50 in the state where the lower end face of the screw 50 is pressed by the pressing plate 60. The height of the peripheral part of the printed wiring board 13 is adjusted by turning each screw 50 on the plurality of spots, to thereby adjust parallelism of the whole prove card 2 to the wafer. COPYRIGHT: (C)2007,JPO&INPIT
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