WAFER CLEANING APPARATUS,申请号KR20050113963-传众专利搜索

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发明名称	WAFER CLEANING APPARATUS
摘要
申请公布号	KR20070055698(A)	申请公布日期	2007.05.31
申请号	KR20050113963	申请日期	2005.11.28
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	BAE, JAE CHAN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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