| 摘要 |
<p>There is provided an optical imaging arrangement comprising: a mask unit (3) comprising a pattern (3.1), a substrate unit (4) comprising a substrate (4.1), an optical projection unit (2) comprising a group (5) of optical element units, the optical projection unit (2) being adapted to transfer an image of the pattern (3.1) onto the substrate (4.1), a first imaging arrangement component (8.1), the first imaging arrangement component (8.1) being a component of one of the optical element units, a second imaging arrangement component (4.2), the second imaging arrangement component (4.2) being different from the first imaging arrangement component (8.1) and being a component of one of the mask unit (3), the optical projection unit (2) and the substrate unit (4), and a metrology arrangement (10). The metrology- arrangement (10) captures a spatial relationship between the first imaging arrangement (8.1) component and the second imaging arrangement component (4.2). The metrology arrangement (10) comprises a reference element (10.2), the reference element (10.2) being mechanically connected directly to the first imaging arrangement component (8.1).</p> |
