发明名称 NOVEL SILICON-GERMANIUM HYDRIDES AND METHODS FOR MAKING AND USING SAME
摘要 The present invention provides novel silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the novel compounds.
申请公布号 WO2007062056(A2) 申请公布日期 2007.05.31
申请号 WO2006US45091 申请日期 2006.11.21
申请人 THE ARIZONA BOARD OF REGENTS, A BODY CORPORATE ACTING ON BEHALF OF ARIZONA STATE UNIVERSITY;KOUVETAKIS, JOHN;RITTER, COLE, J., III;HU, CHANGWU;TSONG, IGNATIUS, S., T.;CHIZMESHYA, ANDREW 发明人 KOUVETAKIS, JOHN;RITTER, COLE, J., III;HU, CHANGWU;TSONG, IGNATIUS, S., T.;CHIZMESHYA, ANDREW
分类号 C01B6/06;H01L21/205 主分类号 C01B6/06
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