| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam optical apparatus capable of reducing spreading of a charged particle beams due to aberration on an image surface. SOLUTION: The charged particle beam optical apparatus detects electrons obtained from a sample irradiated with a primary charged particle beam from a charged particle source as a secondary charged particle beam. The charged particle beam optical apparatus includes a primary optical system which irradiates a rectangular region extending in the X-axis direction to the sample with the primary charged particle beam, and a secondary optical system which allows to detect the second charged particle beam on a detection surface emitted from the sample via an aperture diaphragm, wherein the shape of the aperture is formed in elliptical having the major axis in the Y-axis direction perpendicular to the X-axis direction. COPYRIGHT: (C)2007,JPO&INPIT
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