发明名称 Conductor track arrangement and associated production method
摘要 A conductor track arrangement includes a substrate, at least two conductor tracks, a cavity and a resist layer that covers the conductor tracks and closes off the cavity. By forming carrier tracks with a width less than a width of the conductor tracks, air gaps can also be formed laterally underneath the conductor tracks for reducing the coupling capacitances and the signal delays in a self-aligning manner.
申请公布号 US2007120263(A1) 申请公布日期 2007.05.31
申请号 US20060506570 申请日期 2006.08.18
申请人 GABRIC ZVONIMIR;PAMLER WERNER;SCHINDLER GUENTHER;STICH ANDREAS 发明人 GABRIC ZVONIMIR;PAMLER WERNER;SCHINDLER GUENTHER;STICH ANDREAS
分类号 H01L23/48 主分类号 H01L23/48
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