发明名称 |
Position adjustment device with a piezoelectric element as a lock mechanism |
摘要 |
A position adjustment device employs a holder on which a semiconductor wafer is attached. When placed on a surface plate, the wafer holder is turned upside-down, so that unlocked leg rods and the pattern transfer surface of the wafer are in direct contact with a reference surface of the plate. Piezoelectric elements are embedded in the holder as locking mechanism for the movable leg rods. In response to a variable DC voltage supplied by a voltage generating circuit, the piezoelectric elements deform to lock the rods with high accuracy.
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申请公布号 |
US4689516(A) |
申请公布日期 |
1987.08.25 |
申请号 |
US19860856453 |
申请日期 |
1986.04.28 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
YOKOYAMA, KATSUNORI;TANUMA, CHIAKI |
分类号 |
B23Q1/28;B23Q1/34;G03F7/20;(IPC1-7):H01L41/08 |
主分类号 |
B23Q1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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