| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a device, provided with an optical waveguide and a V groove on the same substrate, in high manufacturing yield without leaving polymer refuse in a V-groove region. SOLUTION: In the optical device having a resin optical waveguide and the V groove for fixing an optical fiber on the same substrate, a photosensitive resin material is used for an adhesive layer between the resin optical waveguide and the substrate in manufacturing the optical device. The device is characterized in that the resin material for the optical waveguide is either one of fluorinated polyimide resin, fully fluorinated polyimide resin, fluorinated silicon resin, fluorinated acrylic resin, deuterated polysiloxane resin, fluorinated epoxy resin, fully fluorinated alicyclic resin or silicon resin, and that the photosensitive resin material is a heat-resistant photosensitive resin. COPYRIGHT: (C)2007,JPO&INPIT |
