| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating applicator for suppressing an aggregation of pigment components of a pigment-dispersed resist. <P>SOLUTION: The coating applicator 1 which coats a pigment-dispersed resist solution on a processing substrate comprises a nozzle 4 for discharging the pigment-dispersed resist solution, a coating solution supply 2 for supplying the pigment-dispersed resist solution, and a piping 3 composed of a conductive tube which introduces the pigment-dispersed resist solution supplied from the coating solution supply 2 to the nozzle. Thus, when the pigment-dispersed resist solution passes through the conductive tube, an aggregation of the pigment components can be suppressed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
