发明名称 HOLDING TOOL
摘要 PROBLEM TO BE SOLVED: To provide a holding tool excellent in durability which can hold a bonded article with a sufficient holding force and can remove the article easily. SOLUTION: The holding tool 1 comprises a substrate 10 having a circumferential wall portion 20, at least one protrusion 30 formed in an internal space 22 surrounded by the circumferential wall portion 20, and a vent 40 communicating with a gap between the circumferential wall portion 20 and the protrusion 30, and an adhesive sheet 50 bonded or applied tightly onto the substrate 10 and having a weak-adhesive portion or a nonadhesive portion on an upper surface located above the protrusion 30 wherein the protrusion 30 is equipped with a top having a curved surface portion or a beveled portion 33. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007134391(A) 申请公布日期 2007.05.31
申请号 JP20050323542 申请日期 2005.11.08
申请人 SHIN ETSU POLYMER CO LTD 发明人 KOMORI ATSUSHI
分类号 H01L21/683;B24B37/30;H01L21/301;H01L21/304 主分类号 H01L21/683
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