| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting device, preventing outside air from entering the inside of the device to constantly perform normal operation without various bad influences involved with the entry of particles. SOLUTION: In the inside of a casing 10, a machining chamber 31 is sectioned by a cover 30, and in the machining chamber 31, a work held on a chuck table 42 is cut by a cutting tool 50 having a cutting blade 52. An internal exhaust pipe for discharging mist generated in cutting is connected to a machining chamber 31. A suction port 15 is formed in the casing 10, and a suction unit 70 including a suction fan 71 for supplying outside air from the suction port 15 to the inside of the device 1 and a filter 72 is provided. According to a detection value of a differential pressure sensor 80 for detecting a pressure difference between the inside and the outside of the device 1, a control part 90 conducts feedback control so that the suction amount of air into the device 1 by the suction unit 70 is larger than the exhaust amount. COPYRIGHT: (C)2007,JPO&INPIT |
