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发明名称
POLIERSYSTEM UND VERFAHREN ZU SEINER VERWENDUNG
摘要
申请公布号
DE60034474(D1)
申请公布日期
2007.05.31
申请号
DE20006034474
申请日期
2000.08.10
申请人
CABOT MICROELECTRONICS CORP.
发明人
WANG, SHUMIN;BRUSIC KAUFMAN, VLASTA;GRUMBINE, STEVEN K.;ZHOU, RENJIE;CHERIAN, ISAAC K.
分类号
B24B37/00;C09G1/02;B24B57/02;B24D11/00;C09K3/14;H01L21/304
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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